Raw and analysed data for contribution paper "Investigation of deoxidation mechanisms on Cu surfaces in a dielectric barrier discharge plasma"

Abstract In this study, we present a laboratory setup for the deoxidation of 10 × 10 mm2 samples via dielectric barrier discharge (DBD) plasma and we show results for the deoxidation of copper in an Ar/H2 atmosphere at 1000 hPa. The effect of combined heat and DBD plasma treatment was investigated by heating surfaces up to 250 °C during plasma operation. All results were compared for surfaces before and after plasma treatment. The chemical structure of surfaces was studied using X-ray Photoelectron Spectroscopy (XPS) and the morphology was measured via Confocal Laser Scanning Microscopy (CLSM). Additionally, the properties of the plasma during the reduction of copper oxides were investigated via Optical Emission Spectroscopy (OES)